Bugaev Aleksandr

StudentBugaev Aleksandr
Main field of study03.04.02 Physics
QualificationMaster
TitleFormation of interfaces in the Si/SiO₂/HfO₂/TiN system depending on the conditions of doping and annealing of ferroelectric HfO₂
StatusNo consent for publication
EditorDoctor of Physics and Mathematics, Professor E.O.Filatova
Year2023