Student | Ignatova Irina |
---|---|
Main field of study | 04.04.01 Chemistry |
Qualification | Master |
Title | Simulation of by-product formation in CVD of Si/SiGe/SiC from chlorine-containing precursors |
Status | No consent for publication |
Editor | Candidate of Chemistry, Associate Professor V.V.Porsev |
Year | 2024 |